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Washington Technology Center is home to a remarkable resource for industrial and academic researchers — the Microfabrication Laboratory. Located in Seattle, the lab serves as a critical facility for research, technology development and prototyping. The 15,000-square-foot lab represents more than $20 million in facilities and equipment, and is the largest public-access microfabrication facility in the Pacific Northwest.
The Microfabrication Laboratory offers advanced microfabrication and characterization capabilities in 8,000 square feet of class 10,000 clean-room space. The lab supports the processing of microelectromechanical systems (MEMS), microfluidic, microoptic, photonic and sensor devices with feature sizes down to one micron on 3" and 4" diameter substrates.
To initiate a project, contact our Microfabrication Laboratory business development manager to discuss:
- Your MEMS technology requirements and project needs.
- Funding opportunities (MFL Lab Access Program, "Cash Matching" RTD funds and others).
- Staffing requirements and agreements.
Contact
Keith Ritala, Business Development Manager
Microfabrication Laboratory
206-616-1381
| Wafer Materials & Sizes |
Our cleanroom processes primarily silicon substrates, although we also have experience with silicon on sapphire, quartz, compound semiconductors and other less common materials. The wafer size for which we have the most equipment is 4", but we also process wafers from 3" to 8". Wafer thickness vary from 200 micron to 1 mm substrates. Some clients utilize other materials such as piezoelectrics, polymers, and photonic materials. |
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Cleanroom Class
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Lab cleanroom is certified Class 10,000
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| Processes |
Include oxidation, doping, annealing, and curing. A variety of metals can be sputtered or evaporated. LPCVD nitride and oxide are available. A new PECVD system provides lab users with oxynitride and other custom thin films. WTC is in the process of installing hardware and developing a process to support the selective growth of single walled carbon nano tube growth. WTC has developed a PECVD silicon nanowire process.
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| Photolithography tools |
Include the HMDS oven, spin coaters contact aligners, bake ovens, and a develop station. Other wet benches provide cleaning (e.g., Nanostrip, SC1, SC2, BOE, piranha) and etching (e.g., HF, KOH, HNA, EDP, TFA gold etch) both isotropic and anisotropic.
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| Plasma etching |
Nitride and silicon is available, including the Bosch Process. A full set of characterization and testing equipment can be used, including KLA-Tencor P15, Nanospec Interferometer, ellipsometer, four point probe, Alphastep, Biorad and electrical testers.
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SEM and EDX
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Equipment and services are available.
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(Note: New rates go into effect October 1, 2010)
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Academic Users:
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$180 per hour of access capped at $1,440 per month per user.
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Industrial Users:
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$205 per hour of access capped at $4,100 per month per user.
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Access Card Deposit:
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$50 per card issued.
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Bar code scanners, fuel cells for laptops and cell phones, actuators, bioscreening devices, biocompatible implants, laser guidance systems, high power diode lasers, digital switches, and microfiltration systems are just a few of the new products developed by companies based on parts they made in the Microfabrication Laboratory. Many of our clients perform confidential work here at the lab, and their needs for maintaining privacy around their designs and processes are respected.
Rates (effective October 1, 2010)
Floor Plan
For General Questions on Lab Use and Capabilities:
Keith Ritala, Business Development Manager
Microfabrication Laboratory
206-616-1381
For Lab Operations and Process-Specific Questions:
Mike Hjelmstad, Manager, WTC Microfabrication Laboratory
206-616-3855
Microfabrication Laboratory
Washington Technology Center
300 Fluke Hall, Box 352140
Seattle, WA 98195-2140
Microfabrication Laboratory
Washington Technology Center
135 Fluke Hall
4000 Mason Road
Seattle, WA 98195
 The Microfabrication Laboratory operates jointly with the NanoTech User Facility at the University of Washington. |
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