Washington Technology Center

TOOL BENCH

Microfabrication Laboratory

Tool Bench

Backend	Anodic Die Bonding CO2 Laser Dicing Saw (K&S) Dicing Saw (Tempress) Probe Station Wire Bonder
Facilities	Acid Neutralization Tank Bead Blaster Burn Box CM4 (Mineral Acids) DI Water Plant Fume Scrubber Gas Bunker Gas Cabinet (Ammonia) Gas Cabinet (Silane) House Vacuum Leak Detector Liquid Nitrogen Fill Station Liquid Nitrogen Storage Tank Particle Counter System 16 (Aliphatic Amines)
High Temperatures	Furnace - Boron (tube 2) Furnace - Cure (tube 4) Furnace - Oxidation (tube 3) Furnace - Phosphorus (tube 1)
CVD	LPCVD LTO LPCVD Nitride PECVD
Metallization	Copper Electroplating Bath E-beam Evaporator - Al E-beam Evaporator - Au Gold Electroplating Bath Magnetron Sputter Sputtersphere
Metrology	Alpha Step Profilometer Bio-Rad Micromeasurement System Drop Gauge Ellipsometer Four Point Probe Leica Microscope Leitz Microscope Nanospec Non-contact Optical Profiler P-15 Profilometer SEM
Photolithography	ABM Contact Aligner Contact Aligner - 3 inch Contact Aligner - 4 inch EVG Contact Aligner EVG Wafer Bonder HMDS Oven Photoresist Bake Oven (Top) Proximity/Vacuum Hotplate Spinner -- CEE #1 Spinner -- CEE #2 Spinner -- Headway UV Flood Exposure Vacuum Oven (Small)
Plasma Etching	Barrel Etcher Deep RIE RIE Tegal Oxide Etcher
Wet Chemicals	3 inch Spin Rinse/Dryer 4 inch Spin Rinse/Dryer (Bottom) 4 inch Spin Rinse/Dryer (Top) 6 inch Spin Rinse/Dryer KOH Bath Quartz Tube Cleaning Station Solvent Bench Spin Developer Wet Bench #1 Wet Bench #3 Wet Bench #4